| 申请日期 | 2025-08-14 | 申请号 | US17532693 |
| 公开（公告）号 | US20220081762A1 | 公开（公告）日 | 2022-03-17 |
| 公开国别 | US | 申请人省市代码 | 全国 |
| 申请人 | Applied Materials Inc | ||
| 简介 | Certain embodiments of the present disclosure relate to methods of forming coated articles. In one embodiment, a method comprises depositing one or more rare earth metal-containing ceramic compounds on an article by atomic layer deposition, for example, to coat surfaces of high aspect ratio internal channels. | ||
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