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MATERIAL FOR SPRAY COATING, SPRAYED COATING, AND MEMBER WITH SPRAYED COATING 发明申请

2023-06-25 3340 276K 0

专利信息

申请日期 2025-06-28 申请号 JP2016217287
公开(公告)号 JP2018076546A 公开(公告)日 2018-05-17
公开国别 JP 申请人省市代码 全国
申请人 TOKYO ELECTRON LTD; FUJIMI INC
简介 PROBLEM TO BE SOLVED : To provide a material for spray coating capable of forming a dense sprayed coating having furthermore-improved plasma erosion resistance. SOLUTION : According to a technology disclosed here, a material for spray coating contains as constituent elements, a rare-earth element (RE), oxygen (O) and a halogen element (X), and further contains a mixed crystal of a rare-earth element oxyhalide (RE-O-X) and a rare-earth element halide (REX3). SELECTED DRAWING : Figure 1 COPYRIGHT : (C)2018, JPO&INPIT


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