| 申请日期 | 2026-04-18 | 申请号 | KR1020170145124 |
| 公开（公告）号 | KR1020180051387A | 公开（公告）日 | 2018-05-16 |
| 公开国别 | KR | 申请人省市代码 | 全国 |
| 申请人 | TOKYO ELECTRON LIMITED; FUJIMI INCORPORATED | ||
| 简介 | The present invention is intended to provide a thermal spray material capable of forming a dense thermal spray film with more improved plasma-corrosion resistance. According to the present invention, composition elements include rare earth element (RE), oxygen (O), and halogen element (X), and a mixed crystal of rare-earth element oxyhalide (RE-O-X) and rare-earth element halide (REX_3) is included in the thermal spray material.(AA) IntensityCOPYRIGHT KIPO 2018 | ||
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