| 简介 |
An objective of the present invention is to provide an impurity removing device capable of controlling whether or not each of a removing process and an external air discharging process is performed based on a concentration of impurity in exhaust gas when the exhaust gas including a first rare gas and neon discharged from an excimer laser device is transferred to a following process. According to the present invention, the impurity removing device comprises : an impurity concentration detection unit to measure the concentration of impurity in the exhaust gas of a discharge line through which the exhaust gas flows; a conversion unit to convert the impurity in the exhaust gas into other substances by plasma decomposition based on a result measured in the impurity concentration detection unit; and a removing unit reacting the substance converted by the conversion unit with a predetermined reactant to remove the reacted substance from the exhaust gas. Moreover, the device comprises a discharge line to discharge the exhaust gas to external air based on the result measured in the impurity concentration detection unit.COPYRIGHT KIPO 2018 |
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