| 申请日期 | 2025-06-28 | 申请号 | US15800419 |
| 公开（公告）号 | US20180127318A1 | 公开（公告）日 | 2018-05-10 |
| 公开国别 | US | 申请人省市代码 | 全国 |
| 申请人 | TOKYO ELECTRON LIMITED; FUJIMI INCORPORATED | ||
| 简介 | Provided is a thermal spray material that can form a compact thermal sprayed coating having an enhanced plasma erosion resistance. The herein disclosed art provides a thermal spray material that contains a rare earth element (RE), oxygen (O), and a halogen element (X) as constituent elements and that contains a mixed crystal of a rare earth element oxyhalide (RE-O—X) and a rare earth element halide (REX3). | ||
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