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Film forming method 发明授权

2023-04-18 4180 105K 0

专利信息

申请日期 2025-09-15 申请号 JP2013536331
公开(公告)号 JP6261980B2 公开(公告)日 2018-01-17
公开国别 JP 申请人省市代码 全国
申请人 株式会社フジミインコーポレーテッド; 東京エレクトロン株式会社
简介 A thermal spray powder of the present invention contains a rare earth element and a group 2 element, which belongs to group 2 of the periodic table. The thermal spray powder, which contains a rare earth element and a group 2 element, is formed, for example, from a mixture of a rare earth element compound and a group 2 element compound or from a compound or solid solution containing a rare earth element and a group 2 element. The thermal spray powder may further contain a diluent element that is not a rare earth element or a group 2 element and is not oxygen, which is at least one element selected, for example, from titanium, zirconium, hafnium, vanadium, niobium, tantalum, zinc, boron, aluminum, gallium, silicon, molybdenum, tungsten, manganese, germanium, and phosphorus.


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