| 申请日期 | 2025-07-23 | 申请号 | JP2016553275 |
| 公开（公告）号 | JP6259111B2 | 公开（公告）日 | 2018-01-10 |
| 公开国别 | JP | 申请人省市代码 | 全国 |
| 申请人 | APPLIED MATERIALS INCORPORATED | ||
| 简介 | An article comprises a plasma resistant ceramic material comprising Y2O3 at a concentration of approximately 30 molar % to approximately 60 molar %, Er2O3 at a concentration of above 30 molar % to approximately 60 molar %, and at least one of ZrO2, Gd2O3 or SiO2 at a concentration of over 0 molar % to approximately 30 molar %. | ||
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