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Ceramic material, method for manufacturing the same, and semiconductor manufacturing apparatus mem 发明授权

2023-09-03 2870 859K 0

专利信息

申请日期 2025-07-10 申请号 US15215884
公开(公告)号 US9856147B2 公开(公告)日 2018-01-02
公开国别 US 申请人省市代码 全国
申请人 NGK INSULATORS LTD
简介 The ceramic material of the present invention contains a crystalline phase of a complex oxide containing a Group II element M and a rare earth element RE. The Group II element M is Sr, Ca, or Ba. An XRD diagram of the ceramic material shows a first new peak between peaks derived from the (040) plane and the (320) plane of MRE2O4. Such a ceramic material may be manufactured by, for example, preparing a material containing MRE2O4 or a material capable of reacting in thermal spray flame to produce MRE2O4 as a thermal spray material, and thermally spraying the thermal spray material onto a predetermined object.


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