| 申请日期 | 2025-06-25 | 申请号 | KR1020170087279 |
| 公开（公告）号 | KR101797232B1 | 公开（公告）日 | 2017-11-13 |
| 公开国别 | KR | 申请人省市代码 | 全国 |
| 申请人 | KSM COMPONENT CO LTD | ||
| 简介 | One embodiment of the present invention relates to an electrostatic chuck made of a nitride aluminum pellet, wherein the nitride aluminum pellet comprises : nitride aluminum; and a composite oxide formed in accordance with a grain of the nitride aluminum. The composite oxide comprises at least two types of rare earth metals having a mutual-employment relationship. The composite oxide has a collection area having higher oxygen content than the surroundings.COPYRIGHT KIPO 2017 | ||
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