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ION ASSISTED DEPOSITION FOR RARE-EARTH OXIDE BASED THIN FILM COATINGS ON PROCESS RINGS 发明申请

2023-11-25 3250 552K 0

专利信息

申请日期 2025-06-27 申请号 US15640287
公开(公告)号 US20170301522A1 公开(公告)日 2017-10-19
公开国别 US 申请人省市代码 全国
申请人 Applied Materials Inc
简介 A ring shaped body includes a top flat region, a ring inner side and a ring outer side. The ring inner side comprises an approximately vertical wall. A conformal protective layer is disposed on at least the top flat region, the ring inner side and the ring outer side of the ring shaped body. The protective layer has a first thickness of less than 300 μm on the top flat region and a second thickness on the vertical wall of the ring inner side, where the second thickness is 45-70% of the first thickness.


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