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RARE EARTH ELEMENT CERIUM COMPOSITE OXIDE PARTICLE AND MANUFACTURING METHOD THEREFOR AND POLISHING C 发明申请

2023-08-21 1940 256K 0

专利信息

申请日期 2025-07-10 申请号 JP2016075924
公开(公告)号 JP2017186196A 公开(公告)日 2017-10-12
公开国别 JP 申请人省市代码 全国
申请人 JSR CORP
简介 PROBLEM TO BE SOLVED : To provide a polishing slurry capable of polishing a silicone polished film at high speed. SOLUTION : A rare earth element cerium composite oxide particle satisfies 3.8≤A/B<5, where A is area strength of a (111) surface and B is area strength of a (200) surface in an X ray diffraction (XRD) with a Cu-k α ray source. The manufacturing method of oxide particles can manufacture the rare earth element cerium composite oxide particle satisfies 3.8≤A/B<5, where A is area strength of the (111) surface and B is area strength of the (200) surface in an X ray diffraction (XRD) with a Cu-k α ray source by heating a composition containing a salt containing a rare earth element and water at 100°C or less. SELECTED DRAWING : Figure 1 COPYRIGHT : (C)2018, JPO&INPIT


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