| 简介 |
PROBLEM TO BE SOLVED : To provide a PZT piezoelectric body membrane which is superior in piezoelectric property and in which leak current density is low and dielectric breakdown voltage is high, and to provide a formation method thereof and a composition for the PZT piezoelectric body membrane formation.SOLUTION : As for a PZT piezoelectric body membrane 21 with perovskite structure, the piezoelectric body membrane 21 contains at least one kind of rare earth elements X of Nd, Pr, Sm, Eu, Gd, Dy or Er, the grain diameter size is not less than 1 μm, the number of crystal grains 22 the crystal orientation of which is different from that of the piezoelectric body membrane 21 is not more than 1 per membrane surface 672 μm2, and Pb, Zr and Ti are contained so that the rate of rare earth elements X of Zr and Ti contained in the piezoelectric body membrane 21 to a metal atomic number 100 is 0.5≤rare earth element X≤3.SELECTED DRAWING : Figure 1COPYRIGHT : (C)2018, JPO&INPIT |
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