| 申请日期 | 2026-03-11 | 申请号 | KR1020177024542 |
| 公开（公告）号 | KR1020170103043A | 公开（公告）日 | 2017-09-12 |
| 公开国别 | KR | 申请人省市代码 | 全国 |
| 申请人 | APPLIED MATERIALS INC | ||
| 简介 | An article comprises a plasma resistant ceramic material comprising Y2O3 at a concentration of approximately 30 molar % to approximately 60 molar %, Er2O3 at a concentration of above 30 molar % to approximately 60 molar %, and at least one of ZrO2, Gd2O3 or SiO2 at a concentration of over 0 molar % to approximately 30 molar %. | ||
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