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A METHOD AND AN ARTICLE FOR RARE-EARTH OXIDE BASED EROSION RESISTANT COATINGS FOR SEMICONDUCTOR APPL 发明授权

2023-08-13 1730 839K 0

专利信息

申请日期 2025-09-11 申请号 KR1020157026487
公开(公告)号 KR101773510B1 公开(公告)日 2017-08-31
公开国别 KR 申请人省市代码 全国
申请人 어플라이드 머티어리얼스 인코포레이티드
简介 An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range between about 1 mol % to about 55 mol %, and Al2O3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 45 mol % to about 99 mol % and Al2O3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 45 mol % to about 99 mol % and ZrO2 in a range between about 1 mol % to about 55 mol %.


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