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Manufacturing method of Electrostatic chuck 发明授权

2022-12-23 1540 409K 0

专利信息

申请日期 2025-07-16 申请号 KR1020160128565
公开(公告)号 KR101769608B1 公开(公告)日 2017-08-21
公开国别 KR 申请人省市代码 全国
申请人 KSM COMPONENT CO LTD
简介 According to one embodiment of the present invention, disclosed is an electrostatic chuck of which at least a portion is made of an aluminum nitride sintered body. The aluminum nitride sintered body comprises : aluminum nitride; and a composite oxide containing two kinds of rear-earth metal. The aluminum nitride sintered body comprises 0.2-20 wt% of the composite oxide. The electrostatic chuck has reduced volume resistivity.(AA) Start(BB) End(S10) Preparing aluminum nitride powder(S20) Preparing composite oxide powder(S30) Forming a mixed powder by mixing the aluminum nitride powder and the composite oxide powder(S40) Primarily pressure forming the mixed powder to produce a preform(S50) Secondarily pressure forming and sintering the preformCOPYRIGHT KIPO 2017


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