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RARE EARTH OXIDE-BASED CORROSION RESISTANT COATING FOR SEMICONDUCTOR APPLICATION 发明申请

2023-06-11 4520 579K 0

专利信息

申请日期 2026-04-27 申请号 JP2016244991
公开(公告)号 JP2017100938A 公开(公告)日 2017-06-08
公开国别 JP 申请人省市代码 全国
申请人 APPLIED MATERIALS INCORPORATED
简介 PROBLEM TO BE SOLVED : To provide a manufacturing method of an article containing a body coated by ceramic coating. SOLUTION : There is provided a manufacturing method of an article including a process 210 for coating at least one surface of a body, where the body contains at least one of ceramic or aluminum, copper, magnesium, ceramic coating contains Y2O3 in a range of about 45 to about 99 mol%, ZrO2 in a range of about 0 to about 55, Al2O3 in a range of about 0 to about 10 mol% or the ceramic coating alternatively contains Y2O3 in a range of about 30 o about 60 mol%, ZrO2 in a range of about 0 to about 20 and Al2O3 in a range of about 30 to about 60 mol%. There is provided a method including a process for conducting ceramic coating on at least one surface of the body by plasma spray, where the coating has thickness of about 5 to about 25 mill. SELECTED DRAWING : Figure 2 COPYRIGHT : (C)2017, JPO&INPIT


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