| 申请日期 | 2025-08-17 | 申请号 | TW103138762 |
| 公开（公告）号 | TWI583654B | 公开（公告）日 | 2017-05-21 |
| 公开国别 | TW | 申请人省市代码 | 全国 |
| 申请人 | 应用材料股份有限公司 | ||
| 简介 | A solid sintered ceramic article may include a solid solution comprising Y2O3 at a concentration of approximately 30 molar % to approximately 60 molar %, Er2O3 at a concentration of approximately 20 molar % to approximately 60 molar %, and at least one of ZrO2, Gd2O3 or SiO2 at a concentration of approximately 0 molar % to approximately 30 molar %. Alternatively, the solid sintered ceramic article a solid solution comprising 40-100 mol% of Y2O3, 0-50 mol% of ZrO2, and 0-40 mol% of Al2O3. | ||
|
您还没有登录，请登录后查看下载地址
|
客服热线：
手机版
二维码
