| 简介 |
(57) the invention relates to training devices by technology integrated circuits (IMC) and can be used at conducting laboratory works on technology IMC and semiconductor devices in higher and middle educational institutions. The result is achieved due, that the claimed gas-discharge device for demonstration of ion spraying of metal has transparent gas-discharge tube, cathode and anode electrodes, arranged in tube and connected to DC source, and holder tube, both end of discharge tube vacuum - tightly are closed by removable means, provided with vacuum sealed to them cathode and anode electric inputs, removal for pumping out air from tube and inlet for supply of working gas in tube, and is additionally provided with magnetic system, consisting of magnetic circuit and the magnetic elements, forming on their free ends closed magnetic gap, support for magnetic system, heat screen in the form of a set of disks, made of nonmagnetic metal, and dielectric elements from melted quartz, located between cathode electrode and mounted on magnetic system heat screen. The gas-discharge tube is made from melted quartz, magnetic elements of - from alloy ferromagnetic metal with rare-earth metal, and heat screen - in the form of a set of disks of aluminium foil. |
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