| 申请日期 | 2026-04-27 | 申请号 | KR1020167017173 |
| 公开（公告）号 | KR101711356B1 | 公开（公告）日 | 2017-02-28 |
| 公开国别 | KR | 申请人省市代码 | 全国 |
| 申请人 | 레르 리키드 쏘시에떼 아노님 뿌르 레뜌드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드 | ||
| 简介 | Methods and compositions for depositing rare earth metal-containing layers are described herein. In general, the disclosed methods deposit the precursor compounds comprising rare earth-containing compounds using deposition methods such as chemical vapor deposition or atomic layer deposition. The disclosed precursor compounds include a cyclopentadienyl ligand having at least one aliphatic group as a substituent and an amidine ligand. | ||
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