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Device and method for manufacturing an electrode for a lithium ion 发明授权

2023-04-24 3560 352K 0

专利信息

申请日期 2025-06-29 申请号 JP2012279685
公开(公告)号 JP6084841B2 公开(公告)日 2017-02-22
公开国别 JP 申请人省市代码 全国
申请人 東京エレクトロン株式会社
简介 A time for doping an electrode material on an electrode sheet with a lithium ion can be reduced. The electrode manufacturing apparatus includes a processing chamber 200 to and from which the electrode sheet is loaded and unloaded; a rare gas supply unit 230 configured to introduce a rare gas into the processing chamber; an exhaust device 220 configured to exhaust an inside of the processing chamber to a certain vacuum level; and a lithium thermal spraying unit 210 configured to dope a carbon material C with the lithium ion by forming a lithium thin film on the carbon material of the electrode sheet W loaded into the processing chamber while melting and spraying lithium-containing powder.


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