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CERAMIC MATERIAL, METHOD FOR MANUFACTURING THE SAME, AND SEMICONDUCTOR MANUFACTURING APPARATUS MEM 发明申请

2023-07-11 3740 908K 0

专利信息

申请日期 2026-04-25 申请号 US15215884
公开(公告)号 US20170029286A1 公开(公告)日 2017-02-02
公开国别 US 申请人省市代码 全国
申请人 NGK INSULATORS LTD
简介 The ceramic material of the present invention contains a crystalline phase of a complex oxide containing a Group Il element M and a rare earth element RE, The Group II element M is Sr, ca, or Ba. An XRD diagram of the ceramic material shows a first new peak between peaks derived from the (040) plane and the (320) plane of MRE2O4. Such a ceramic material may be manufactured by, for example, preparing a material containing MRE2O4 or a material capable of reacting in thermal spray flame to produce MRE2O4 as a thermal spray material, and thermally spraying the thermal spray material onto a predetermined object.


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