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Rare earth oxide-based corrosion-resistant coating for semiconductor applications 发明授权

2023-07-27 4950 3577K 0

专利信息

申请日期 2025-06-27 申请号 JP2015559325
公开(公告)号 JP6064060B2 公开(公告)日 2017-01-18
公开国别 JP 申请人省市代码 全国
申请人 APPLIED MATERIALS INCORPORATED
简介 An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range between about 1 mol % to about 55 mol %, and Al2O3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 45 mol % to about 99 mol % and Al2O3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 45 mol % to about 99 mol % and ZrO2 in a range between about 1 mol % to about 55 mol %.


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