| 申请日期 | 2026-04-23 | 申请号 | US14413255 |
| 公开（公告）号 | US9547238B2 | 公开（公告）日 | 2017-01-17 |
| 公开国别 | US | 申请人省市代码 | 全国 |
| 申请人 | Eugen Pavel | ||
| 简介 | A method of making a photoresist with rare-earth sensitizers is provided. The rare-earth sensitizer could be a salt or a rare-earth complex. According to the invention, photoresist composition is useful to pattern circuits by visible light. | ||
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