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MATERIAL FOR SPRAY COATING, SPRAY COATING FILM, AND MEMBER WITH SPRAY COATING FILM 发明申请

2023-01-03 2150 118K 0

专利信息

申请日期 2025-07-08 申请号 JP2016043940
公开(公告)号 JP2016211071A 公开(公告)日 2016-12-15
公开国别 JP 申请人省市代码 全国
申请人 TOKYO ELECTRON LTD; FUJIMI INC
简介 PROBLEM TO BE SOLVED : To provide a material for spray coating capable of forming a spray coating film having excellent characteristics such as porosity and hardness, in addition to plasma erosion resistance. SOLUTION : A material for spray coating contains an oxyhalogenated compound of a rare-earth element (RE-O-X) containing the rare-earth element (RE), oxygen (O), and a halogen element (X) as constituent elements. In an X-ray diffraction pattern of the material for spray coating, an intensity ratio [(IB+IC)/IA] of a sum of peak intensity IB of a main peak of an oxide of the rare-earth element and peak intensity IC of a main peak of a halide of the rare-earth element to peak intensity IA of a main peak of the oxyhalogenated compound of the rare-earth element is less than 0.02. SELECTED DRAWING : Figure 1 COPYRIGHT : (C)2017, JPO&INPIT


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