| 简介 |
PROBLEM TO BE SOLVED : To provide a target which is not easily cracked in a process of forming a superconductive thin film by a PLD method, and a method of manufacturing the same.SOLUTION : A target for making a superconductive thin film includes a rare earth oxide superconductive sintered body expressed by REBaCuO(RE is one or more elements selected from rare earth elements), and is composed of a sintered body made by sintering a compact of a calcined body of raw material powder including an RE compound, a Ba compound and a Cu compound. The surface of the target is irradiated with a laser beam. The sintered body is composed of an aggregate of a plurality of flat particles, and the plurality of flat particles are piled up while arranging flat surfaces thereof in a direction parallel to the surface and are sintered so as to integrate boundaries of the particles with each other. |
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