| 简介 |
PROBLEM TO BE SOLVED : To provide a method of producing a silicon nitride sintered body having stable durability in terms of peeling resistance, and imparting low damage to a mating material.SOLUTION : There is provided the method of producing a silicon nitride sintered body containing Mg and at least one kind of rare earth elements. The method includes a raw material powder preparation step of adding a sintering assistant containing Mg and at least one kind of rare earth elements (RE) to a silicon nitride powder having a 50% cumulative particle diameter (d50) of 0.2 to 3 μm and having a relationship (d90-d10)/d50 among the 50% cumulative particle diameter (d50), 10% cumulative particle diameter (d10) and 90% cumulative particle diameter (d90), the relationship (d90-d10)/d50 being in the range of 0.5 to 8, in such a manner that a ratio (RExOy/MgO) in the case of oxide conversion of Mg and at least one kind of rare earth elements (RE) falls within the range of 0.05 to 50 and mixing them to form the raw powder and a sintering step of sintering molded body which is molded by the raw material, under a pressure of 0.2 to 10 MPa and in nitrogen atmosphere. |
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