| 申请日期 | 2025-06-25 | 申请号 | KR1020160054485 |
| 公开（公告）号 | KR1020160131916A | 公开（公告）日 | 2016-11-16 |
| 公开国别 | KR | 申请人省市代码 | 全国 |
| 申请人 | TOKYO ELECTRON LTD; FUJIMI INC | ||
| 简介 | The present invention provides a thermal spray material which is able to form a thermal spray coat having remarkably improved plasma erosion resistance. The thermal spray material comprises : rare earth element oxyhalides (RE-O-X) including rare earth elements (RE), oxygen (O), and halogen elements (X) as components in a ratio greater than or equal to 77 mass%. Moreover, the thermal spray material does not have the oxide of the rare earth element. | ||
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