| 简介 |
Provided is a thermal spray material excellent in features such as porosity and hardness, capable of forming a thermal spray film, in addition to anti-plasma corrosivity. According to the disclosed technology, provided is a thermal spray material, which includes rare earth element oxyhalide (RE-O-X) including rare earth element (RE), oxygen (O), and a halogen element (X). In x-ray diffraction pattern of the thermal spray material, the intensity ratio [(I_B + I_C) / I_A] is less than 0.02, in which the intensity ratio is the ratio of a sum of I_B which is the peak intensity of a main peak of rare earth element oxide and I_C which is the peak intensity of a main peak of rare earth element halide, with respect to I_A which is the peak intensity of a main peak of the rare earth element oxyhalide. |
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