| 申请日期 | 2025-06-25 | 申请号 | US15142181 |
| 公开（公告）号 | US20160326058A1 | 公开（公告）日 | 2016-11-10 |
| 公开国别 | US | 申请人省市代码 | 全国 |
| 申请人 | TOKYO ELECTRON LIMITED; FUJIMI INCORPORATED | ||
| 简介 | This invention provides a thermal spray material capable of forming a thermal spray coating excellent in plasma erosion resistance as well as in properties such as porosity and hardness. The thermal spray material comprises a rare earth element oxyhalide (RE-O—X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. The rare earth element oxyhalide has a halogen to rare earth element molar ratio (X/RE) of 1.1 or greater. | ||
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