| 简介 |
PROBLEM TO BE SOLVED : To provide a target capable of depositing an oxide superconducting thin film having uniform superconducting property, even when performing deposition for a long time for producing a long-sized oxide superconducting wire.
SOLUTION : There is provided a target for producing an oxide superconducting thin film expressed as REBa2Cu3OX (RE is a rare-earth element). Concerning the target for producing the oxide superconducting thin film, the target comprises a sintered body obtained by sintering a compact of base powder containing a RE compound, a Ba compound and a Cu compound, and the sintered body has pores having a porosity of 20% or less and a maximum pore diameter of 10 μm or less.
SELECTED DRAWING : Figure 3
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