| 简介 |
PROBLEM TO BE SOLVED : To provide a diffusion processing apparatus capable of performing diffusion processing with a higher mass production efficiency than a conventional manufacturing apparatus, and to provide a method of manufacturing an R-T-B-based sintered magnet.
SOLUTION : A diffusion processing apparatus includes : a first cylindrical wall 24 defining a processing space 24S for receiving an R-T-B-based sintered magnet piece, and a RH diffusion source containing a heavy rare earth element RH containing Dy or Tb; three partitions 26 for dividing a processing space into three processing chambers 24Sa, 24Sb, 24Sc extending in the longitudinal direction; a diffusion furnace including a first lid provided at one end of the processing space in the longitudinal direction, and having three first openings arranged to correspond with three processing chambers 24Sa, 24Sb, 24Sc, respectively, and a second lid provided at the other end of the processing space in the longitudinal direction, and having three second openings arranged to correspond with three processing chambers 24Sa, 24Sb, 24Sc, respectively, and supported tiltably and rotatably; and a heater provided on the outside of the first wall 24.
SELECTED DRAWING : Figure 2
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