| 申请日期 | 2026-03-07 | 申请号 | US14531785 |
| 公开（公告）号 | US9440886B2 | 公开（公告）日 | 2016-09-13 |
| 公开国别 | US | 申请人省市代码 | 全国 |
| 申请人 | Applied Materials Inc | ||
| 简介 | A solid sintered ceramic article may include a solid solution comprising Y2O3 at a concentration of approximately 30 molar % to approximately 60 molar %, Er2O3 at a concentration of approximately 20 molar % to approximately 60 molar %, and at least one of ZrO2, Gd2O3 or SiO2 at a concentration of approximately 0 molar % to approximately 30 molar %. Alternatively, the solid sintered ceramic article a solid solution comprising 40-100 mol % of Y2O3, 0-50 mol % of ZrO2, and 0-40 mol % of Al2O3. | ||
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