| 简介 |
PROBLEM TO BE SOLVED : To provide a corrosion-resistant member with a high dielectric constant and high mechanical strength, and an electrostatic chuck device including the corrosion-resistant member.
SOLUTION : A corrosion-resistant member 1 containing ReAlO3 (Re is rare earth element) and Al2O3 contains multiple crystal grains 2 and multiple secondary phases 4 existing in a triple point of grain boundary 3 between the neighboring crystal grains 2. The ratio of the Al2O3 in the secondary phase 4 is higher than the ratio of the Al2O3 in the crystal grain 2. An electrostatic chuck device includes the corrosion-resistant member.
SELECTED DRAWING : Figure 1
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