| 简介 |
PROBLEM TO BE SOLVED : To provide : a corrosion-resistant member capable of strengthening an adsorption power when applying an electric field and weakening a residual adsorption power when stopping applying an electric field when used for an electrostatic chuck device; a method for producing the corrosion-resistant member; and an electrostatic chuck device including the corrosion-resistant member.
SOLUTION : There is provided a method for producing a corrosion-resistant member which comprises : a sintering step of sintering a molded product of a raw material mixture prepared by mixing a plurality of raw material powders of ReAlO3 i(Re is a rare earth element) in an atmosphere of at least one gas selected from argon, nitrogen and helium or under a reduced atmosphere; and a heat treatment step of heat-treating the molded product sintered in the sintering step at 900 to 1400°C for 10 to 30 hours.
SELECTED DRAWING : None
COPYRIGHT : (C)2016, JPO&INPIT |
客服热线：
手机版
二维码
