| 简介 |
PROBLEM TO BE SOLVED : To provide : a corrosion-resistant member capable of strengthening an adsorption power when applying an electric field when used for an electrostatic chuck device; a method for producing the corrosion-resistant member; and an electrostatic chuck device using the corrosion-resistant member.
SOLUTION : There is provided a corrosion-resistant member which comprises at least one selected from ReAlO3 (Re is a rare earth element), a rare earth oxynitride, an aluminum oxynitride and a rare earth aluminum oxynitride. There is provided an electrostatic chuck device 10 which electrostatically adsorbs a planar sample W using a ceramic base material 20 containing a corrosion-resistant member and is fixed on the ceramic base material 20. There is provided a method for producing a corrosion-resistant member which comprises a sintering step of sintering a molded product of a raw material mixture prepared by mixing a plurality of raw material powders of ReAlO3 (Re is a rare earth element) in a nitrogen atmosphere.
SELECTED DRAWING : Figure 1
COPYRIGHT : (C)2016, JPO&INPIT |
客服热线：
手机版
二维码
