| 申请日期 | 2026-03-10 | 申请号 | JP2021516771 |
| 公开（公告）号 | JP2022501650A | 公开（公告）日 | 2022-01-06 |
| 公开国别 | JP | 申请人省市代码 | 全国 |
| 申请人 | エーエスエムエル ネザーランズ ビー ブイ | ||
| 简介 | An object, such as a sensor for an immersion lithographic apparatus, has an outer layer which comes in contact with immersion liquid and wherein the outer layer has a composition including a rare earth element. There is also provided an immersion lithographic apparatus having such an object and a method for manufacturing such an object. | ||
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