| 简介 |
PROBLEM TO BE SOLVED : To provide a silicon nitride sintered body high in chemical resistance to acid, alkali or the like.
SOLUTION : There is provided silicon nitride sintered body having silicon nitride crystal particles 1 and a grain boundary phase 2, where the grain boundary phase 2 contains no rare earth element and has area ratio of the grain boundary phase 2 per unit area of 20 μm×20 μm of 10 to 20% when taking a picture of any cross section of the silicon nitride sintered body. There is particle containing one kind of 4A group element selected from Ti, Zr and Hf in the grain boundary phase 2 and the particle exists as a single body of a compound of oxide, nitride, hydride or carbide of 4A group element, a major axis is preferably 2 μm or less, there is preferably 1 to 5 particles containing the elements per unit area of 20 μm×20 μm, and Si and 2A group element form preferably no solid solution in the particle.
SELECTED DRAWING : Figure 1
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