| 简介 |
PROBLEM TO BE SOLVED : To provide a target for formation of an oxide superconducting film having a split structure.SOLUTION : A target for formation of an oxide superconducting film is used to form a thin film of an oxide superconductor having a composition of REBaCuO, where RE is one or more rare earth elements, on a substrate by a laser vapor deposition method and composed of sintered bodies of a raw material mixture containing elements RE, Ba, and Cu, serves as a split type target for laser vapor deposition based on depositing atoms, molecules or fine particles produced by beam-irradiating the surface with a laser beam on a substrate to form a film on the substrate and consists of a target inner part composed of a sintered body arranged in the central part and a target outer frame part composed of one or more sintered bodies arranged so as to surround the periphery of the target inner part. |
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