| 申请日期 | 2026-03-15 | 申请号 | US17279133 |
| 公开（公告）号 | US20210397100A1 | 公开（公告）日 | 2021-12-23 |
| 公开国别 | US | 申请人省市代码 | 全国 |
| 申请人 | ASML NETHERLANDS B V | ||
| 简介 | An object, such as a sensor for an immersion lithographic apparatus, has an outer layer which comes in contact with immersion liquid and wherein the outer layer has a composition including a rare earth element. There is also provided an immersion lithographic apparatus having such an object and a method for manufacturing such an object. | ||
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