| 简介 |
The present invention relates to a method for forming a coating layer and a waterproof coating member. The method for forming a coating layer according to the present invention includes : (a) a step of supplying a precursor including a rare earth metal on a substrate; (b) a step of purging impurities of the precursor remaining after the rare earth metal is combined on the substrate; (c) a step of supplying an oxidizing agent on the substrate; and (d) a step of purging impurities remaining after the coating layer including a rare earth metal oxide is formed on the substrate. The method for forming a coating layer according to the present invention forms the coating layer having hydrophobic property or super hydrophobic property, by adjusting the temperature of the substrate so that an atomic ratio of carbon in the coating layer can be less than 1%.(AA) Start(BB) End(S11) Supplying precursor including rare earth metal on substrate(S12) Purging impurities of precursor remaining after rare earth metal is combined on substrate(S13) Supplying oxidizing agent on substrate(S14) Purging impurities remaining after coating layer including rare earth metal oxide is formed on substrate(S15) Coating layer formation is completed?COPYRIGHT KIPO 2016 |
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