| 申请日期 | 2025-07-11 | 申请号 | JP2012238894 |
| 公开（公告）号 | JP5861612B2 | 公开（公告）日 | 2016-02-16 |
| 公开国别 | JP | 申请人省市代码 | 全国 |
| 申请人 | Shin Etsu Chemical Co Ltd2060 | ||
| 简介 | A powder comprising rare earth element fluoride particles having an aspect ratio of up to 2, an average particle size of 10-100 μm, a bulk density of 0.8-1.5 g/cm3, and a carbon content of 0.1-0.5 wt % is amenable to atmospheric plasma spraying. An article obtained by spraying the rare earth fluoride spray powder to a substrate undergoes few partial color changes and performs well even when used in a halogen gas plasma. | ||
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