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SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME 发明申请

2023-10-28 3920 1297K 0

专利信息

申请日期 2025-06-26 申请号 US17076813
公开(公告)号 US20210391471A1 公开(公告)日 2021-12-16
公开国别 US 申请人省市代码 全国
申请人 Taiwan Semiconductor Manufacturing Company Ltd
简介 A transistor device and the manufacturing methods are described. The device includes a gate structure having a gate layer and a ferroelectric layer, source and drain terminals, and a crystalline channel portion. The source and drain terminals are disposed at opposite sides of the gate structure. The crystalline channel portion extends between the source and drain terminals. The source and drain terminals are disposed on the crystalline channel portion and the gate structure is disposed on the crystalline channel portion. The crystalline channel portion includes a first material containing a Group III element and a Group V element, the gate layer includes a second material containing a Group III element and a rare-earth element, and the ferroelectric layer includes a third material containing a Group III element, a rare-earth element and a Group V element.


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