| 简介 |
Disclosed is a hard coating including a chemical composition specified by formula : (TiaAlbSicRd)Ox, where R represents at least one rare-earth element; and a, b, c, d, and x are atomic ratios respectively of Ti, Al, Si, R, and O. The atomic ratios meet conditions as specified by formulae : 0.30≦a≦0.7, 0.30≦b≦0.70, 0≦c≦0.2, 0.005≦d≦0.05, a+b+c+d=1, and 0.5≦a/b<1. The atomic ratios meet a condition as specified by Formula (1) when R does not include Ce. The atomic ratios meet a condition as specified by Formula (2) when R includes Ce. The hard coating has better wear resistance as compared with conventional nitride films and oxide films.
[in-line-formulae]0.8≦[x/(2a+1.5b+2c+1.5d)]≦1.2 (1)[/in-line-formulae]
[in-line-formulae]0.8≦[x/(2a+1.5b+2c+2d)]≦1.2 (2)[/in-line-formulae] |
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