| 申请日期 | 2025-07-18 | 申请号 | US14833437 |
| 公开（公告）号 | US20150361540A1 | 公开（公告）日 | 2015-12-17 |
| 公开国别 | US | 申请人省市代码 | 全国 |
| 申请人 | SHIN ETSU CHEMICAL CO LTD | ||
| 简介 | A spray material comprising rare earth element oxyfluoride particles having an aspect ratio of up to 2, an average particle size of 10-100 μm, and a bulk density of 0.8-2 g/cm3, and containing not more than 0.5 wt % of carbon and 3-15 wt % of oxygen is suitable for air plasma spraying. An article having a sprayed coating of rare earth element oxyfluoride has high resistance against plasma etching and a long lifetime. | ||
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