| 申请日期 | 2025-07-07 | 申请号 | JP2015527035 |
| 公开（公告）号 | JP2015534714A | 公开（公告）日 | 2015-12-03 |
| 公开国别 | JP | 申请人省市代码 | 全国 |
| 申请人 | TDK Corporation3067 | ||
| 简介 | A thin film piezoelectric device according to the present invention includes a pair of electrode layers and a piezoelectric thin film interposed between the pair of electrode layers, wherein the piezoelectric thin film contains a rare gas element and has a content gradient of the rare gas element in the thickness direction of the piezoelectric thin film. | ||
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