| 简介 |
PROBLEM TO BE SOLVED : To provide a method for producing a silicon nitride substrate, in which the dense silicon nitride substrate can be produced from a powdery starting material containing silicon powder and it is unnecessary to remove an alternation layer from a formed sintered molded article thereof.
SOLUTION : The method for producing the silicon nitride substrate comprises : a powdery starting material preparation step of using the powdery starting material containing silicon powder, 1-7 mol% of rare earth element compounds in terms of oxides thereof and 8-15 mol% of magnesium compounds in terms of oxides thereof when the silicon in the powdery starting material is converted into silicon nitride; a sheet molding step of molding the powdery starting material into a sheet-like shape to obtain a sheet body; a nitridation step of heating the sheet body under a nitrogen atmosphere at 1, 200-1, 500°C to nitride the silicon contained in the sheet body; and a sintering step of sintering the sheet body containing nitrided silicon under the nitrogen atmosphere.
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