申请日期 | 2025-06-28 | 申请号 | JP2012026322 |
公开(公告)号 | JP5811877B2 | 公开(公告)日 | 2015-11-11 |
公开国别 | JP | 申请人省市代码 | 全国 |
申请人 | Sumitomo Electric Industries Ltd2130 | ||
简介 | PROBLEM TO BE SOLVED : To provide a conductive oxide using a small amount of a rare metal and suitable for a sputtering target, and to provide a method for producing the conductive oxide.SOLUTION : A conductive oxide comprises crystalline material InAlMgO(0 |
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