| 简介 |
PROBLEM TO BE SOLVED : To provide a hydrogen sensor having structure that prevents a hydrogen permeable metal from diffusing to a rare earth metal film and being manufacturable homogeneously with high reproducibility.
SOLUTION : A hydrogen sensor 1 comprises a substrate 2, a rare earth metal film 3 formed on the substrate 2, and a protective film 4 formed on the rare earth metal film 3. The protective film 4 is formed by laminating a first ceramic material layer 41A, a second ceramic material layer 41B, and a third ceramic material layer 41C, with a hydrogen permeable metal 42 disposed on each of the ceramic material layers. It is preferable that the hydrogen permeable metal 42 is formed in the shape of an island.
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