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Manufacturing method of feed-through 发明授权

2023-06-21 1110 438K 0

专利信息

申请日期 2025-07-07 申请号 KR1020150052127
公开(公告)号 KR101566890B1 公开(公告)日 2015-11-02
公开国别 KR 申请人省市代码 全国
申请人 KOREA STAR TECH CO LTD
简介 The present invention relates to a method for manufacturing a feed-through. The method for manufacturing the feed-through according to the embodiment of the present invention includes a first step of preparing a base (10), a second step of forming a plurality of electrodes (20) on the upper side of the base with a preset pattern, a third step of forming an insulation layer (30) to surround the electrode and the upper side of the base, a fourth step of forming a ground part (40), and a fifth step of forming a reception groove (50) and including an O-ring (60). The present invention easily manufactures the feed-through and forms a large number of electrodes. The O-ring prevents the pressure of a vacuum chamber or a high pressure chamber from being leaked to the outside.COPYRIGHT KIPO 2016


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