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RARE-EARTH OXIDE BASED EROSION RESISTANT COATINGS FOR SEMICONDUCTOR APPLICATION 发明申请

2022-12-30 3930 1160K 0

专利信息

申请日期 2025-06-25 申请号 KR1020157026528
公开(公告)号 KR1020150115953A 公开(公告)日 2015-10-14
公开国别 KR 申请人省市代码 全国
申请人 APPLIED MATERIALS INC
简介 An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range between about 1 mol % to about 55 mol %, and Al2O3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 45 mol % to about 99 mol % and Al2O3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 45 mol % to about 99 mol % and ZrO2 in a range between about 1 mol % to about 55 mol %.


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